- Introduction
- Feedback
XD780 is an X-axis piezo nanopositioning stage, with 50μm, 150μm or 200μm travel. It adopts a no-friction flexible hinge guiding mechanism and integrated structural design. It is equipped with high-performance piezo actuators to ensure 200μm displacement. The closed-loop version has a full bridge design which avoids temperature drift and ensures that the positioning accuracy is nanoscale.
Characteristics
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XD780.50 
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XD780.150/200 
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Loaded Step Time XD780.50S loading 5kg(1V), the step time is about 15ms.
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Closed-Loop Curve-XD780.150S 
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Z-direction multi head objective focusing 
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Z-direction multi head objective focusing 
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Application
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| Technical Data | |||||
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Type |
S-Closed loop |
XD780.50S |
XD780.150S |
XD780.200S |
Units |
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Active axes |
X |
X |
X |
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Drive control |
1 driving channel, 1 sensing channel |
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Nominal travel range(0~120V) |
40 |
120 |
160 |
μm±10% |
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Max.travel range(0~150V) |
50 |
150 |
200 |
μm±10% |
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Mechanism |
Direct Drive |
Amplified Drive |
Amplified Drive |
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Sensor type |
SGS/- |
SGS/- |
SGS/- |
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Resolution |
2/0.5 |
5/1.5 |
7/2 |
nm |
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Linearity |
0.01/- |
0.03/- |
0.05/- |
%F.S. |
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Repeatability |
0.02/- |
0.01/- |
0.02/- |
%F.S. |
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Load capacity |
Horizontal |
5 |
5 |
5 |
kg |
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Vertical |
5 |
5 |
5 |
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Inverted |
5 |
5 |
5 |
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Unloaded resonant frequency |
2200 |
760 |
700 |
Hz±20% |
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Resonant frequency@5kg |
160 |
100 |
85 |
Hz±20% |
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Step time |
15@5kg(1V)/7.5 |
30/4 |
50@5kg（1V）/10
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ms±20% |
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El. capacitance |
10.2 |
27.2 |
27.2 |
μF±20% |
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Material |
Steel, Al |
Steel, Al |
Steel, Al |
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Mass(Cable included) |
450 |
1000 |
＜1051 |
g±5% |
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| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
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| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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Piezo · Nano · Motion
