VH13 series is a Z-axis metal-sealed preloaded piezo actuator, with two ranges available: 42μm and 46μm. It is less affected by environmental humidity because of the Isolation from the atmosphere. It has a longer service life and higher performance, suitable for various applications such as semiconductor device manufacturing equipment and optical communication equipment that require high reliability.
Characteristics
High reliability |
Easy to install |
Low mechanical wear |
Blocking force to 800N |
Nanoscale positioning |
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Application
Precision XY step adjustment of various worktable |
Mirror/prism Positioning |
Linear motion |
Fluid flow control valve drive |
Vibration source |
Manipulator, etc. |
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Technical Data | |||
Type |
PSt150/7/40VH13K |
PSt150/7/55VH13K |
Units |
Active axes |
Z |
Z |
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Nominal travel range(0~120V)* |
33.6 |
37 |
μm±20% |
Max.travel range(0~150V) |
42 |
46 |
μm±20% |
Unloaded resonant frequency |
15 |
12 |
kHz±20% |
Blocking force |
800 |
800 |
N±20% |
Stiffness |
19 |
17 |
N/μm±20% |
El.capacitance |
3.5 |
4.2 |
μF±20% |
Material |
Steel |
Steel |
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Mass |
25 |
30.6 |
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Size |
Φ11.5×44.4 |
Φ11.5×54.5 |
mm |
VH13 series is aNote:Nominal stroke at 0~120V, Mounting preloaded force less than 20% of blocking force. Connector or wire connection.
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