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XYZ Motion, CAP Sensor, Non-magnet Piezo Nanopositioning Stage and Controller!

Update time：2023-04-18 08:49:14Clicks：1260second
This time we introduces a piezo nano-positioning stage with XYZ 3-axis motion and closed-loop capacitor sensor and its corresponding controller. The capacitor motion stage is P12.XYZ100C and the controller is E00.D11AL.

01

P12.XYZ100C Piezo Nanopositioning Stage


The 3 axes motion of P12.XYZ100C piezo nano-positioning stage adopts series connection. During the design process, the volume is reduced as much as possible, its volume is only 80×80×45mm^3. There is a φ40mm circular through hole in the center, suitable for light transmission or structure integration, placement.

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Closed-loop Capacitor Sensor

P12.XYZ100C piezo nanopositioning stage adopts capacitive sensor for closed-loop control, and has 3 internal capacitive sensors to measure and feedback the displacement of X, Y and Z axes in real time. 
Capacitive sensor is a kind of non-contact measurement. The change of distance between the capacitor probe and the measured surface, that is, the piezo nano-positioning plastage moves, changes the distance between the capacitor probe and the capacitor probe, and causes the voltage value of the output of the capacitor sensor to change. The voltage value corresponds to the displacement of the nano-positioning stage. 
Non-contact measurement means there is no contact between the sensor and the moving surface, and will not have additional influence on the movement of the displacement table, which can ensure very good accuracy and long-term stability, and the response speed is very fast.

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Non-magnetic

Another important characteristic of P12.XYZ100C piezo nanopositioning stage is non-magnetic. It adopts non-magnetic material and non-magnetic processing technology to ensure that the product itself will not bring additional magnetic field to the applied system environment, so it is very suitable for applications requiring non-magnetic environment.
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Product measurement curve

1）Step Rise Curve
The measured results show that the step rise time of P12.XYZ100C piezo nanopositioning stage  is less than 100ms.

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2）Displacement VS Voltage Curve
The voltage and displacement curves of P12.XYZ100C piezo nanopositioning stage are shown in the figure below. In the closed-loop control, the drive control voltage is linearly related to its displacement. At 130V driving voltage, the displacement can reach 90μm.

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3）Repeatability Curve
Under different percentage stroke, the repeated positioning accuracy will be different, which is related to the characteristics of piezo ceramics used, flexible hinge structure, etc. The measured results show that the repeatable positioning accuracy of P12.XYZ100C piezo nanopositioning stage is better than 0.027% in the whole displacement range, and better than 0.014%F.S. at 10% stroke.
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Applications

P12.XYZ100C piezo nanopositioning stage has high resolution, high precision and non-magnetic material selection, making it very suitable for super resolution microscopy, screening, confocal microscopy, biotechnology, etc.

Technical Data

The basic parameters of P12.XYZ100C piezo nanopositioning stage are as follows.
Model
P12.XYZ100C
Active axes
XYZ
Sensor
CAP
Travel range(0~120V)
90μm/axis
Resolution
7nm
Repeatability
Better than 0.027%F.S.
Pitch/yaw/roll
≦35μrad
Unloaded step time
100ms
Unloaded resonant frequency
X:170Hz，Y:245Hz，Z:170Hz
Resonant frequency (500g load)
X:69Hz，Y:93Hz，Z:85Hz
El. capacitance
3.6μF
Load capacity
500g
Note: The above parameters are measured by piezo controller E00.D11AL.

02

E00.D11AL Piezo Controller


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P12.XYZ100C piezo nanopositioning stage is driven by E00.D11AL piezo controller.
E00.D11AL piezo controller is a three-channel output piezo controller, capacitor closed loop, it can be controlled by analog signal or digital signal. It has a LCD keyboard control module, but also through RS-232, RS-422, USB and other interfaces to communicate with the upper computer, software control.

Introduction of the Front Panel 

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Technical Data

The basic technical parameters of E00.D11AL piezo controller are as follows. It is designed for capacitive closed-loop piezo nanopositioning stage. It can not only drive P12.XYZ100C piezo nanopositioning stage, but also be compatible with other capacitive closed-loop piezo nanopositioning stage. 
Model
E00.D11AL
Channels
3
Control analog input
0~10V（optional 0~5V）
Optional output voltage
-20~150V（Optional 120V）
Peak current
1A
Ave. Current
291mA
Amplifier Bandwidth
10kHz
Ripple
10mVpp（Load 2.2μF）
PZT connector
ERA.00.250.CTL
Control input connector
BNC
Sensor
Sensor type
CAP
Serve system peculiarity
Analog P-I+ Notch filter
Sensor input interface
G10S0C-FT1LJG0-000L
Sensor output connector
ERA.0S.303.CLL
Sensor output voltage
0~10V
Main control
Communication interface
RS-232/422, USB
D/A convertor
16Bit
A/D convertor
16Bit
Other
Operating temperature range
10~50°C
Current Limitation
Short circuit protection
Size
L 536×H 175×D 375mm
Mass
~12kg
Power supply
AC220V，50Hz

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