Hollow and Non - hollow Piezo Nano Positioning Stage
The hollow piezo nano-positioning stage has an aperture in the center. This design is very suitable for transmission light applications or special structural requirements. The through hole size of CoreMorrow hollow piezo nano-positioning stage varies from φ10mm to φ310mm, and the shape is round, square, etc. It can be used for small aperture application of small equipment (such as infrared thermal imaging), and large equipment (such as large aperture interferometer) for the large aperture application.
temperature vacuum version and non-magnetic version. The standard version is designed for normal room temperature. The low-temperature, vacuum and non-magnetic versions are designed for special environmental applications. It uses low-temperature piezoelectric ceramic actuators and lightweight low-temperature resistant, non-magnetic structural materials. All internal components are environmentally compatible.
Low temperature vacuum magnetic stage is suitable for semiconductor processing and detection.
Model |
P13A.XYZ80K |
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Operating temperature |
Room temperature |
4K |
Aperture size |
5mm×5mm |
5mm×5mm |
Displacement |
80μm |
25μm |
Active axes |
X Y Z |
X Y Z |
Resolution |
1nm |
0.3nm |
The piezo nano-positioning stage is driven by PZT piezo ceramics, but the internal driving structure can be divided into direct drive mechanism and amplification mechanism.
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Load capacity |
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The difference between direct drive and amplification mechanism is the contrast when other conditions are same. The displacement of amplifying mechanism is larger, under the same driving voltage, the displacement of amplifying mechanism is several times to dozens of times that of direct drive mechanism stages. The direct drive mechanism stages have faster response speed and shorter positioning time. The closed-loop version of both the two driving methods have very high accuracy.
Open-loop and Closed-loop Version
The piezo nano positioning stage can be configured with an optional sensor inside to form a closed-loop control. The stages are divided into open - loop and closed - loop versions according to whether it is equipped with a sensor or not. Closed-loop stage is equipped with sensors, and there is a variety of sensor types available, such as capacitive, inductive, strain type closed-loop. In addition, we can use an external sensor and CoreMorrow piezo controller to form a closed-loop control. The type of closed-loop sensor affects the control accuracy, dimension, operating frequency and cost of the piezo nano-positioning stage.
The resolution of the open-loop piezo nano-positioning stage is infinitely high, which is only limited by the noise of the control equipment. However, due to the hysteresis and creep characteristics of the piezo ceramics, its repeatability and stability are low. The closed-loop version can eliminate hysteresis and creep, which enables higher positioning accuracy and real-time feedback of positioning position. In addition, in the closed-loop version, the drive control voltage is linearly related to the displacement generated by the piezoe nano positioning stage, which is very suitable for nanoscale precise positioning applications. The open-loop piezo nano-positioning stage is suitable for dynamic scanning applications.
Multiple Applications
According to the application environment, the piezo nano-positioning stages can be divided into general nano-positioning stage, piezo phase shifter, piezo scanner, piezo microscopic imaging platform and so on.
The genneral piezo nano-positioning stage can be applied to all kinds of applications, which can be selected according to the displacement, bearing capacity, working frequency and shape structure in the application.
The piezo phase shifter is specially designed for the corresponding optical shift, the stepping resolution can be less than 0.5nm, which can be used forward, upside down, side horizontal. It has large bearing capacity and various sizes of the center through hole reserved, so as to facilitate the passage of light, which are necessary phase shifter components in laser interferometer measurement.
Piezo microimaging stages are designed for microscopic imaging applications. They usually have a large, medium-hole design with mounting holes that match the sample platform of the microscopic imaging instrument. The sample table structure of the piezo microscopic imaging table can be customized.
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Technical Data
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Applications of Piezo Nano-Positioning Stage
The piezo nano-positioning stage has nanoscale ultra-high precision, diverse customization and reliable performance, so it can be widely used in various applications, such as scanning microscopy, optical path adjustment, nanomanipulation technology, biotechnology, laser interference, optical communication, CCD image processing, microscopic imaging/manipulation, nanoimprint/lithography, nanopositioning/measurement, confocal microscopy, AFM, etc., due to its nanoscale ultra-high precision, diverse customization and reliable performance.
1)Applied to Closed-loop Control of Forces
The piezo nano-positioning stage can step in nanometer scale, and under the control of voltage signal, the displacement can be generated in the basic linear relationship with the voltage signal. In addition, the piezo nano-positioning stage can also generate output, which is also linear with the voltage signal.
In the following figure, it is a force closed-loop system built by CoreMorrow P83 series macro-micro composite stage and XP-63X series piezo nanopositioning stage combined with probe system and force sensor, so as to carry out high-precision surface micro-machining of special materials.
2)Applied to 3D Micro-nano Printing
5)Applied to Interference
Installation and Operation Instructions of Piezoelectric Nano-positioning Platform
1)Safety Guidelines
2)Installation and Precautions
3)Loading