Introduction of Piezo Nanopositioning Stage
Adopt High-Performance Piezo Actuator
Adopt Frictionless Flexible Mechanism
2.Vacuum Non-Magnetic and Application Scenarios
3.Design of Vacuum Piezo Nanopositioning Stage
Measured Features of Vacuum Piezo Nanopositioning Stage
1)Voltage vs Displacement Curve
2)Step Response Time
Small step 300ms (30μm, 1.5kg load)
3)Measured Technical Parameters of Vacuum Version
Vacuum Version P60 Piezo Stage Supporting Piezo Controller
1)E53 Piezo Controller Frequency vs Load Curve
2) E53 Piezo Controller Technical Parameters
Connection Vacuum Piezo Stage and Piezo Controller
7.Application Prospect of Vacuum Piezo Nanopositioning Stage