Features
• θx, θy tilt movement
• Optional open loop and closed loop
• 80×80mm aperature
• High-resolution
• Suitable for acceleration/angular velocity sensor calibration
Voltage Displacement Curve
Application
With its ultra-thin shape and high-precision deflection, the S54 series piezo tilting stage has been applied in batches for laser beam combining and other applications.
Batch Product Testing Video
Technical Parameter
Model: S54.T2
Motion way: θx, θy
Deflection angle (0~120V): ±0.8mrad/axis (≈±165")
Deflection angle (0~150V): ±1mrad/axis (≈±200")
Closed loop sensor: SGS
Closed loop resolution: 0.25μrad (≈0.05")
Open loop resolution: 0.05μrad (≈0.01")
Closed loop linearity: 0.2%F.S.
Closed loop repeat positioning accuracy: 0.1%F.S.
Push/pull force: 40/8N
Movement direction stiffness: 0.5N/μm
No-load resonance frequency: X450/Y400Hz
Closed/open loop no-load step time: 20/3.5ms
Closed loop operating frequency (-3dB): 110Hz (no load)
Carrying capacity: 1kg
Working temperature range: -20~80℃
Electrostatic capacity: 3.6μF/axis
Material: aluminum, steel
Weight: 510g
Outgoing line length: 1.5m