Features
• X-direction movement
• Stroke up to 330μm
• Anti-vibration design
• Two-channel control (including 1 constant voltage)
• Differential drive
• Quick response
Application
• Metrology/Interference
• Nano positioning
• Quality Assurance Testing
• Precision control
Voltage Displacement Curve
Step Time Curve
Product Motion Video
Technical Parameter
Motion type: X
Stroke range (0~120V): ±130μm
Stroke range (0~150V): ±165μm
Sensor: SGS
Closed/open loop resolution: 12/5nm
Closed loop linearity: 0.1%F.S.
Closed loop repeat positioning accuracy: 0.04%F.S.
Pitch/Yaw/Roll: <10μrad
Push/pull force: 300/30N
Movement direction stiffness: 1.2 N/μm
No-load resonance frequency: 490Hz
Closed/open loop no-load step time: 80/40ms
Carrying capacity: 0.6kg
Electrostatic capacity: 24.6μF
Working temperature: -40~+80℃
Anti-vibration design: half sine 15g, 11ms
Back peak sawtooth wave 20g, 11ms
Material: steel, aluminum
Weight: 950g
Recommended Controller