Characteristics
• X-direction movement
• Stroke up to 38μm
• Bearing capacity up to 100g
• Optional closed loop version, vacuum version
Typical Application
• Nanometer precision position adjustment
• Scanning microscopy
• Micro operation
• Nano positioning/measurement
• Micromachining
High Dynamic and High Precision
Technical Parameters
Model: P66A.X30
Motion: X axis
Nominal travel range (0~120V): 30μm
Stroke range (0~150V): 38μm
Closed loop sensor type: SGS
Closed/open loop resolution: 10/5nm
Closed loop linearity: 0.1%F.S.
Closed loop repeat positioning accuracy: 0.1%F.S.
Push/pull force: 200/10N
Motion direction stiffness: 10N/μm
No-load resonance frequency: 2000Hz
Closed/open loop no-load step time: 5/1.5ms
Carrying capacity: 100g
Electrostatic capacity: 3.6μF
Table body material: aluminum
Cable length: 1.5m
Recommended Controller
E01.D1
Software can be re-developed
E53.D