M60 series linear piezo motor adopts PZT driving internally. The linear motion stroke can be 25mm, 50mm, 100mm, and the resolution can reach sub-nanometer level. Optional closed-loop servo sensor (incremental encoder), with higher positioning accuracy. Optional movable surface is available.
Features
• Large blocking force
• Automatic return after closed loop accident
• Automatic position to zero after power on
• Optional grating digital closed loop
• Using wear-resistant materials, vacuum non-magnetic compatible
Applications
• Industrial-grade precision positioning
• Semiconductor technology/testing
• Wafer inspection
• Lithographic printing
• Nano imprinting
• Nano metrology
• Movement in strong magnetic fields and vacuum
Large blocking force
The active blocking force of M60 series linear piezo motors can reach 50N, and the passive holding force can reach 60N. Moreover, when the M60 is placed horizontally, it can carry out high-precision movement under a load of 10kg.
Incremental encoder improves accuracy
M60 can be equipped with an incremental encoder as a closed-loop sensor to improve the accuracy of linear motion.
Power-off self-locking, automatic zero, automatic return
After the M60 is powered off, it has a self-locking function, and when it is powered on again, it will automatically change the position. In use, if there is an accidental collision, M60 will automatically adjust the position.
Wear-resistant materials
M60 linear piezoelectric motor uses highly wear-resistant materials with a life span of more than one kilometer.
Recommend Piezo Controller
E71 series piezo controller is specially designed to drive the M60 linear piezo motor. It is digitally controlled by the upper computer, the movement speed is adjustable, and it adopts the setting method of approaching the target position.
Parameters
Model: M60
Axis: X
Integrated sensor: incremental encoder
Stroke range: 25mm, 50mm, 100mm
Speed online: 10mm/s
Closed loop resolution: <10nm
Open loop resolution: <0.1nm
Push/pull force (active): 50N
Holding power (passive): 60N
Working temperature: 0~50℃
Mass (including cable): 565g
Material: aluminum, stainless steel
Cable length: 1.5m