1.Manual coarse adjustment frame: It provides a deflection range of ±6° per axis to achieve initial alignment of the optical path and large-scale static deviation compensation. Its highly rigid mechanical structure provides a stable foundation for subsequent fine adjustment.  

2.Piezo tip/tilt stage: Based on manual setting, it offers a deflection range of 3.5mrad per axis, featuring micro-radian resolution and millisecond-level response speed. This part is responsible for compensating the rapid jitter and slow drift of the optical path in real time and dynamically.

1.Static Pre-Adjustment and Long-Term Drift Compensation

When the optical path slowly drifts due to system startup or changes in ambient temperature, the manual coarse adjustment mechanism can be used for re-alignment to actively compensate for larger static deviations and ensure that the beam remains within the effective working range.

2.Dynamic Real-Time Vibration Compensation

When the system is disturbed by external vibration or other factors, the piezo deflection mirror is driven to precisely deflect the lens at an angle, thereby compensating for the beam in the opposite direction along its propagation path.

1.Laser communication: Compensate for the beam pointing deviation caused by platform vibration and other factors to maintain a stable communication link.

2.Interferometry system: It is used to stabilize the optical path of the laser interferometer, compensate for angular drift caused by environmental disturbances, and ensure the stability of the interference fringes.

3.Laser direct writing: During long-term processing, it compensates for the slow drift of the optical path to ensure the positioning accuracy of the processed pattern and the consistency of feature dimensions.

4.Modular integration: By increasing holes, it can be integrated as a functional module into a cage structure, ensuring the coaxial optical path and enabling rapid and stable compensation for multi-optical path systems, significantly enhancing the efficiency and structural rigidity of high-precision optical system construction.