With the continuous improvement of science and technology in scientific research and industry, there is an increasing demand for flexible and high-precision positioning systems. CoreMorrow piezo nano positioning stage can produce 1~6 axis linear and tilt motion with high speed and high precision, which can be widely used in semiconductor, optics, medical, aerospace, biotechnology and other micro and nano operation fields.

H60.XYZTR5 piezo hexapod is a piezo stage with 6-axis motion of θx, θy, θz, X, Y, and Z. 6-axis precision linear and angular motion in space is realized by the coordinated expansion and contraction of six piezoelectric actuators and advanced control algorithm. The stage has a compact structure. Due to the parallel motion design, it can perform complex multi-axis motion trajectories. The closed-loop version is equipped with high-precision sensors for real-time monitoring and feedback of position, achieving nanoscale precision positioning control with high stiffness, high reliability and repeatability. It is UHV campatible. The product is shown in the following figure.

Motion in X, Y, Z, θx, θy, θz

High load capacity

Closed-loop version for high accuracy

No accumulation of error

Semiconductor equipment

optics

Wafer inspection/micromachining

Medical  

Aerospace

E70.D6S piezo controller is very suitable for driving the H60.XYZTR5 piezo hexapod. E70.D6S is a piezo ceramic controller with high power, low power consumption, high bandwidth and low ripple noise. It is cascaded by two modular E70 controllers. Each single E70 module has 3 channels, and up to 32 modules can be cascaded up to 96 channels. The controller uses DC24V power supply, can be controlled by external analog signal or RS-422 interface digital communication, open/closed loop optional, integrated PZT&sensor interface is very easy to connect. External control function can be set, easy to operate.