

At the microscopic scale, every nanoscale movement may trigger a technological breakthrough. Whether it is repairing tiny LED chips or manipulating probes for nanoscale positioning, a motion system capable of precise control within a small space is required. CoreMorrow N11 piezo motor stage is not only compact in size but also features millimeter-level travel and nano-level resolution, making it an ideal choice for precise adjustment in confined Spaces.
I. Why does N11 Piezo Motor Stand out
The core advantage of the CoreMorrow N11 piezo motor lies in its precise structural design logic:
◆ 1. Stick-slip drive principle: By adopting the stick-slip effect of piezo ceramic drive and utilizing the micro-deformation of PZT piezo ceramics, continuous nanoscale steps are achieved, converting the micro-deformation into millimeter-scale strokes. It takes into account both nanoscale accuracy and millimeter-scale long stroke range, with a single-axis stroke as high as 3.6mm(±1.8mm).

◆2. Extreme compactness: The single-axis version measures only 15×15×7mm^3, which is the smallest millimeter-level stroke stage in terms of volume. It can be easily integrated into optical systems, vacuum chambers or portable devices with limited space, and is an excellent solution for precise motion in small Spaces.

◆ 3. Multi-degree-of-freedom expansion: It can be customized according to the scene, and single-aixs, 2-axis and 3-axis precision motion systems can be constructed like building blocks to meet the multi-axes motion requirements of different scenes.

II. Laser Repair for LED Chips
In the refined manufacturing process of LED light-emitting chips, repairing individual damaged chips is the key to improving the yield rate. The high-precision displacement capability of the N11 piezo motor has become the core support for the LED chip repair link.

◆ 1. Construction of dynamic through holes: Place and combine four N11 1-axis piezo motors in pairs, and install specially made templates with rectangular notches on them. By controlling the coordinated movement of four N11 piezo motor, a through hole (light-transmitting slit) with adjustable size and position can be formed at the center.
◆ 2. Precise defect location: When a defect in a certain LED chip is identified, the system can drive the N11 piezo motor to move the shielding plate, quickly and accurately exposing the target chip, providing a pure working window for laser repair. Thus, during the laser stripping of defective chips and electrode welding, damage to the surrounding normal chips is effectively avoided, achieving minimally invasive repair in the micron-level area.
◆ 3. Adaptive size: The size of the through holes can be freely adjusted from tens of micrometers to several millimeters. This means that it can easily handle LED chip products of different sizes, greatly enhancing the universality and convenience of the equipment.
This LED chip repair solution based on the N11 piezo motor is a crucial step towards fully automatic and high-yield mass production of LED chips. It can be integrated into online detection and repair equipment to achieve rapid screening and precise handling of chip defects, significantly reducing costs and enhancing core competitiveness.
In addition, CoreMorrow N59 ultrasonic piezo motor is also suitable for this system. N59 is compact in size and structure, and is less affected by external electromagnetic interference and noise. It features fast movement speed, small steps, uniform and stable performance, and high cost performance.

III. Building a Multi-Axis Precision Probe Station
In fields such as semiconductor testing and biological microscopic manipulation, probe stations are powerful tools for extending human hands and eyes and interacting with the microscopic world. The N11 series piezo motor is precisely the ideal motion module for building such high-end equipment.

◆ 1. Building multi-dimensional motion:An XYZ 3-axis motion system can be freely built by using N11 piezo motors. Due to its extremely compact nature, the overall size of the probe station it forms can also be optimized, saving a significant amount of space for the microscope workbench or experimental chamber.
◆ 2. Precisely driving the probe: By installing the microprobe or microinjection needle on the N11 piezo motors, the control capability with nanomet-level precision can be obtained. Whether it is to locate a specific transistor for electrical performance testing or to inject drugs into a single cell, the N11 piezo motor displacement stage can smoothly and precisely deliver the probe to the target position.
◆ 3. Covering long-stroke operation: A 3.6mm stroke is of great significance in micro-operation-related applications. It means that the probe can search for the target within a relatively large range without the need for frequent repositioning of the sample, thereby simplifying the operation process and improving the efficiency of experiments and detects.
From cell microinjection in the laboratory to chip failure analysis in semiconductor factories, and even to the cutting-edge scanning probe microscopy (SPM), the probe station constructed with the N11 piezo motor can provide reliable motion support. Its modular feature allows for rapid development and customization, flexibly meeting various special scientific research and industrial needs.
Technical Data of N11 Piezo Motor
Technical Data
|
Model |
N11.X3.5K |
|
Active axis |
X |
|
Nominal travel range |
3.6mm/±1.8mm |
|
Max. speed |
2mm/s |
|
Open-loop resolution |
6nm |
|
Blocking force |
0.5N |
|
Holding force(Self-locking at rest) |
1.5N |
|
Load capacity(Horizontal) |
0.1kg |
|
Load capacity(Vertical) |
0.02kg |
|
Axial stiffness |
1N/μm |
|
Vertical stiffness |
2N/μm |
|
Working temperature |
0~50℃ |
|
Cable length |
2m |
|
Material |
Al, stainless steel |
|
Mass(without cable) |
6g |
|
Recommended controller |
E53.C1K-J |
N11 piezo motor, with its extremely compact design and the perfect combination of millimeter-level stroke and nano-level precision, not only addresses the industry pain point of limited space and the inability to achieve both high precision and long stroke, but also, with its high modularity and flexibility, has become a good assistant in multiple high-end fields ranging from LED chip manufacturing to life sciences.
Recommended Controller
Recommended Controllers
E53.C1K-J is specially designed for driving piezoelectric motors. It is a single-channel open-loop piezo controller, powered by 24VDC and controlled digitally. It is very suitable for driving the N11 series piezo moto. Its is compact in size and structure, with dimensions of only 105×103×30.1mm^3, making it easy to integrate.

For further details, please call +86-451-86268790, or add WeChat ID: 17051647888.

