The piezo screw motion platform combines the piezo screw actuator with the slide stage, and uses the high-precision motion control of the piezo screw actuator to control the motion of the slide stage. Multiple piezo screw motion platforms can form 2-axis or 3-axis motion control through dimensional combination, or control platform to generate multi-dimensional motion by performing linear motion with multiple piezo screw actuators.  

CoreMorrow Multi-axis piezo screw motion platforms

N91.XYZUR0K 5-axis piezo screw motion platform is a high-precision platform capable of moving in 5 dimensions: X, Y, Z, θy, and θZ. In the linear direction, it can achieve a displacement of XY4mm/Z2mm, and deflection angle of ±4° per axis. Its angular resolution can be up to 0.2urad, the linear resolution is less than 30nm. It can carry 1.2kg sample in motion. When cooperate with CoreMorrow E55.C4K piezo controller and combined with precise algorithms, this platform can achieve high-precision motion control of 5 axes. The product is shown in the following picture.

Active axis: X, Y, Z, θy, θz

Linear travel range: XY4/Z2mm

Deflection angle: ±4°/ axis

Self-locking at rest

Load capacity: 1.2kg

The vacuum version available

Motion Direction Control of N91.XYZUR0K

Semiconductors, scanning electron microscopy (SEM) sample manipulation, atomic force microscopy, wafer processing and inspection, probe stations, laser processing, optical path adjustment, laser stabilization, fiber alignment, optical testing systems, biomedicine, super-resolution imaging sample movement, etc.

CoreMorrow E53.C4K piezo controller is very suitable for driving the N91.XYZUR0K 5-axis piezo screw motion platform. The 4-channel version can drive 4 piezo screw actuators with switching mode. It adopts 24VDC/1A power supply and digital control, and connect through TYPE-C, RS-422 and RS-232 serial ports. It has a compact structure of 150x80x27.5mm^3, very easy to integrate.

For further details, please call +86-451-86268790, or add WeChat ID: 17051647888.