Characteristics
Optional travels of 500μm |
Load capacity to 0.4kg |
Millisecond response time |
Closed loop for higher repeatability |
Excellent focus stability |
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Adjustable response time |
Driving and Control |
Match brands/sizes of objectives |
Thread Adapter for Easy Integration P73 series objective positioner is connected to the objective lens through an adapter to quickly make the objective lens in the desired position. A variety of thread adapters are available, such as M27×0.75, M26×0.75, M26×1/36", M25×0.75, W0.8×1/36", etc., which can also be customized for easy integration with the microscope. |
Frequency and Load Curve |
Surface Analysis |
Applications
Adjustment focus |
Image processing |
Confocal microscope |
Semiconductor inspection |
Laser processing |
Interference shape measurement |
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Technical data | |||
Models |
S-Closed loop K-Open loop |
P73.Z200S-C1 P73.Z200K-C1 |
Units |
Active axis |
Z |
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Travel range(0~120V) |
400 |
μm±10% |
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Travel range(0~150V) |
500 |
μm±10% |
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Sensor |
SGS/- |
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Closed/open loop resoluiton |
13.4/4 |
nm |
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Linearity |
0.1/- |
%F.S. |
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Repeatability |
0.05/- |
%F.S. |
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Push/pull force |
80/10 |
N |
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Stiffness |
0.2 |
N/μm±20% |
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Unloaded resonant frequency |
170 |
Hz±20% |
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Closed/open loop unloaded step time |
20/10 |
ms±20% |
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Load |
0.4 |
kg |
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Capacitance |
14 |
μF±20% |
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Material |
Steel, Al |
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Mass |
290 |
g±5% |
Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.
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