P73.Z500S/K-C1 Piezo Objective ScannerCurrent Location:Product Homepage >> Piezo Objective Scanner>>P73.Z500S/K-C1 Piezo Objective Scanner
P73.Z500S/K-C1 Piezo Objective Scanner
  • Introduction
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Characteristics


 Optional travels of 500μm

 Load capacity to 0.4kg

 Millisecond response time

 Closed loop for higher repeatability

 Excellent focus stability





Adjustable response time

Driving and Control

Match brands/sizes of objectives

Thread Adapter for Easy Integration

P73 series objective positioner is connected to the objective lens through an adapter to quickly make the objective lens in the desired position. A variety of thread adapters are available, such as M27×0.75, M26×0.75, M26×1/36", M25×0.75, W0.8×1/36", etc., which can also be customized for easy integration with the microscope.

Frequency and Load Curve

Surface Analysis


Applications


 Adjustment focus

 Image processing

 Confocal microscope

 Semiconductor inspection

 Laser processing

  Interference shape measurement



    Technical data

Models

S-Closed loop

K-Open loop

P73.Z200S-C1

P73.Z200K-C1

Units

Active axis

Z

 

Travel range0~120V

400

μm±10%

Travel range0~150V

500

μm±10%

Sensor

SGS/-

 

Closed/open loop resoluiton

13.4/4

nm

Linearity

0.1/-

%F.S.

Repeatability

0.05/-

%F.S.

Push/pull force

80/10

N

Stiffness

0.2

N/μm±20%

Unloaded resonant frequency

170

Hz±20%

Closed/open loop unloaded step time

20/10

ms±20%

Load

0.4

kg

Capacitance

14

μF±20%

Material

Steel, Al

 

Mass

290

g±5%

Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.

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