P63.XZ is XZ-axis moving piezoelectric nano-positioning stage. It adopts the design principle of piezoelectric stack direct-drive mechanism and could achieve nano-level resolution and positioning accuracy, has very high reliability, and plays an important role in the field of precision positioning.
Characteristics
XZ |
Displacement to 6.8μm |
Quick response time |
Max load capaciyt to 0.5kg |
Appearance |
Moving-part |
Direct-driving |
Small Size Quick Response
P63 piezoelectric nano positioning stage is characterized by high precision and small size. The size of the P63.X is only 30×30×21mm (XYZ axis is 30×30×42mm), which is very easy to integrate into the scanning instrument. |
Sensor |
Application case P63.XYZ has been applied to the cutting force test based on SEM online nano cutting stage. |
Applications
Optical fiber end detection |
Nano-imprinting |
Nanoscale |
Micro manipulatio |
Nanometer lithography |
Micromachining/precision control |
Biotechnology/miconductor technolog |
Quality assurance test |
Interferometry/scanning microscopy/nanometer localization |
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Technical Data | ||||
Models |
S-Closed loop
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P63.XZ7S |
P63.XZ7K |
Units |
Active axes |
X,Z |
X,Z |
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Drive control |
2 driving channels 2 sensing channels |
2 driving channels |
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Travel range(0~120V) |
5.5/axis |
5.5/axis |
μm±10% |
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Travel range(0~150V) |
6.8/axis |
6.8/axis |
μm±10% |
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Integrated sensor |
SGS |
- |
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Closed/open loop resolution |
0.2 |
0.1 |
nm |
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Closed-loop linearity |
0.4 |
- |
%F.S. |
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Repeatability |
0.2 |
- |
%F.S. |
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Pitch/Yaw/Roll |
<10 |
<10 |
μrad |
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Push/pull force capacity |
9/2 |
9/2 |
N |
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Stiffness |
X1.2/Z1.5 |
X1.2/Z1.5 |
N/μm±20% |
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Unloaded resonant frequency |
X1.5/Z1.6 |
X1.5/Z1.6 |
kHz±20% |
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Closed/open-loop unloaded |
1.5 |
0.3 |
ms±20% |
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Load capacity |
0.5 |
0.5 |
kg |
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Electrical capacitance |
0.8/轴 |
0.8/axis |
μF±20% |
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Material |
铝 |
铝 |
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Mass |
120 |
120 |
g±5% |
Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.
Technical data are measured by CoreMorrow E00/E01 series piezo controller.
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